Synthesis of Aminosilane Chemical Vapor Deposition Precursors and Polycarbosilazanes through Manganese-Catalyzed Si–N Dehydrocoupling
Journal article   Peer reviewed

Synthesis of Aminosilane Chemical Vapor Deposition Precursors and Polycarbosilazanes through Manganese-Catalyzed Si–N Dehydrocoupling

Thao T Nguyen, Tufan K Mukhopadhyay, Samantha N MacMillan, Michael T Janicke and Ryan J Trovitch
ACS sustainable chemistry & engineering, Vol.10(13), pp.4218-4226
04/04/2022

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amines atom economy catalysis waste prevention silane earth-abundant metal

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